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EIU Department of Physics

Thin Film Deposition System

Thin film lab

The Department of Physics has a thin film deposition system. This system can use an electron beam to heat material and make a vapor that deposits on whatever material that we want to put it on. This system can lay down thin films as thin as nanometers thick (a few atoms thick). It has the capability to make complicated layers with as many as four different materials. This system has many uses including the study of thermal transport in nanostructures, a very hot topic right now.

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Contact Information

Physics Department

Physical Sciences Building Room 2131
Eastern Illinois University
600 Lincoln Ave
Charleston, IL 61920
(217) 581-3220
Fax: (217) 581-8548

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